COMPARATIVE ANALYSIS OF BORON COATINGS DEPOSITED BY MAGNETRON SPUTTERING IN ARGON AND NITROGEN

10.25712/ASTU.1811-1416.2023.04.007

Abstract

A comparative analysis of the properties of boron coatings on the surface of stainless steel deposited in an argon and nitrogen using a planar magnetron with a thermally insulated discharge-heated target made of pure crystalline boron is presented. Coating deposition rates were measured, which, at discharge power of 40 W using argon and nitrogen as working gases, were about 4 and 4.7 nm/min, respectively. The surface relief of the coating was studied by scanning electron microscopy. It is shown that, despite the difference in the nature of the relief of coatings formed in argon and nitrogen, the morphological properties of the surfaces are close. The results obtained by X-ray phase analysis and transmission electron diffraction microscopy indicate the predominance of the amorphous boron phase in coatings deposited in these gases. At the interface between the coating and the substrate, the formation of particles of iron borides and crystalline boron with sizes from 3 nm to 4.5 nm, formed both in argon and nitrogen, was revealed.