INVESTIGATION OF THE INFLUENCE OF THE SHAPE FACTOR OF INTERLAYER TRANSITIONS ON THE PROCESS OF CRACKING OF METAL-CERAMIC BOARDS AND CHIP HOUSINGS

PACQMI

Authors

DOI:

https://doi.org/10.25712/ASTU.2072-8921.2024.01.032

Abstract

The article considers the process of formation of cracks in ceramic-metal boards in the zone of localization of interlayer vias formed on the basis of tungsten two-fraction metallization pastes with an average particle size of 0.9 and 2.0 μm, which provide electrical connection between the switching layers of microcircuit packages. A study was made of the influence of the "form factor" of interlayer vias, their structure and placement density on the process of cracking of ceramic-metal boards. The size effect of the direct proportional dependence of the temperature shrinkage of interlayer vias on the diameter and density of their placement on the board is revealed, which has a significant effect on the cracking of boards in the zone of interlayer vias. It has been established that the fineness of the powder filler of the paste intended for the formation of interlayer vias has a significant effect on the degree of consistency between the temperature shrinkage of ceramics and the interlayer via, and hence on the magnitude of stresses at the boundary of the system of elements under consideration, which contribute to the formation of microcracks. It was revealed that the toroidal shape of the interlayer via, characterized by the presence of a cylindrical cavity, which in turn is the initiator of tangential stresses in the volume of the transition, leads to the formation of microcracks. At the same time, continuous interlayer vias have an increased resistance to temperature effects, but do not exclude the possibility of microcracks formation at the “ceramics - interlayer via” boundary. The conditions for the formation of interlayer vias of a toroidal shape with a diameter of 0.1 to 0.5 mm are considered. The dominating effect of the viscosity of metallizing tungsten pastes in the range from 1000 to 70000 Poise on the possibility of the formation of a cylindrical cavity in the volume of the interlayer via has been established. Practical methods for preventing their occurrence are proposed. An estimate of tangential stresses in the volume of toroidal interlayer transitions is given. It has been proven that the formation of an internal cavity in the center of the interlayer via, during its formation, leads to a decrease in temperature shrinkage by 4% relative to the values of thermal shrinkage of a continuous interlayer via. Comparative analysis of temperature shrinkage was carried out for cermet boards containing interlayer vias from 0.3 to 0.5 mm in their volume.

References

Ермолаев Е.В. Разгерметизация металлокерамических корпусов в области межслойных проводников в производственных условиях // Вестник ПГТУ. Сер. Радиотехнические и инфокоммуника-ционные системы. 2014. № 1. С. 87–92.

Lee J., Ma Q., Marieb T., Mack A.S., Fujimoto H., Flinn P., Woolery B., Keys L. Measurement and modeling or intrinsic stresses in CVDW lines. Mater Res. Soc. Symp. Proc. (In Russ.).

Ma Q., Lee J., Fujimoto H. (1997). Probing stresses in metal trenches using Raman piezospectros-copy. Advances in Electronic Packaging, (19), 8–16. (In Russ.).

Greenebaum B., Sauter A.I., Flinn P.A., Nix W.D. (1991). Stress in metal lines under passivation; compar-ison of experiment with finite element calculations. Journal of Applied Physics Letters, (17), 1845–1847. (In Russ.). DOI: 10.1063/1.105075.

Shen Y.L, Suresh S., Blech I.A. (1996). Stresses, curvatures, and shape changes arising from patterned lines on silicon wafers. Journal of Applied Physics, (3), 1388–1398. (In Russ.). DOI: 10.1063/1.362938.

Korhonen M.A, Borgesen P. (1993). Stress evo-lution due to electromigration in confined metal lines. Journal of Applied Physics, (73), 3790-3799. (In Russ.). DOI: 10.1063/1.354073.

Suo Z.L. (1998). Stable state of interconnect un-der temperature change and electric current. Journal of Acta Materialia, (11), 3725–3732.

Афонов О.Н. Влияние конструктивных и тех-нологических факторов на коррозию металлокера-мических корпусов интегральных схем: автореф. дис. … на соискание ученой степени кандидата техн. наук. Йошкар-Ола, 2005. 152 с.

Михеева Е.В. Контроль спаев металлокерамических плат и корпусов микросхем в условиях массового производства: автореф. дис. … на соискание ученой степени кандидата технических наук. Йошкар-Ола, 2004. 153 с.

Зуев А.В. Экспертная система контроля качества продукции в процессе производства метал-локерамических и коммутационных плат: автореф. дис. … на соискание ученой степени кандидата техн. наук. Йошкар-Ола, 2006. 149 с.

Otsuka К., Ucami Т., Sekihata М. (1981). Inter-facial bond strength in alumina ceramics metallized and covered with tungsten, Journal of the American Ceramic Society, (5), 540‒545. (In Russ.).

D.A. Chance. Refractory Metallization of Green Ceramic. (1970). Journal of Metallurgical Transation, (1), 685–694. (In Russ.). DOI: 10.1007/BF02811596.

Liu X.H., Suo Z., Fujimoto H. (2000). Develo-ping rules to avert cracking and debonding in integrat-ed circuits. Engineering Fracture Mechanics, (66), 387–402. (In Russ.).

Freund L., Kim K. Spiral cracking around a strained cylindrical inclusion in a brittle material and implications forvias in integrated circuits. MRS Sympo-sium Proceedings (Materials Research Society). (In Russ.).

Xia Z.C., Hutchinson J.W. (2000). Crack patterns in thin films. Journal of the Mechanics and Phys-ics of Solids, (48), 1107–1131. (In Russ.).

Ермолаев Е.В. Структурные напряжения в межслойных проводниках металлокерамических корпусов в производственных условиях // Актуальные вопросы науки, технологии и производства: материалы 1 Международной научно-практической конференции. Пенза, 2014. С. 67–72.

Способ измерения вязкости высоковязких жидкофазных сред: пат. 2738911 Рос. Федерация № 2020109808; заявл. 05.03.2020; опубл. 18.12.2020, Бюл. № 35. 8 с.

Published

2024-03-29

How to Cite

Ermolaev Е. В. ., Zhukov И. А. ., & Tkachev Д. А. (2024). INVESTIGATION OF THE INFLUENCE OF THE SHAPE FACTOR OF INTERLAYER TRANSITIONS ON THE PROCESS OF CRACKING OF METAL-CERAMIC BOARDS AND CHIP HOUSINGS: PACQMI. Polzunovskiy VESTNIK, (1), 245–257. https://doi.org/10.25712/ASTU.2072-8921.2024.01.032

Issue

Section

SECTION 2. CHEMICAL TECHNOLOGIES, MATERIALS SCIENCES, METALLURGY